ListarIngeniería eléctrica por tema "nanofabricación"
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Resolution improvements on poly(methyl methacrylate) as electron-beam resist
(San José, Costa Rica, 2012-10-23)The present thesis expands the topic of lithographic resolution improvement of poly(methyl methacrylate) (PMMA) as a positive tone electron-beam resist. The investigation used electron-beam lithography (EBL) to define ...