Crecimiento de estructuras de carbono mediante deposición química en fase de vapor a baja presión
Fecha
2022
Tipo
artículo original
Autores
Varela Fonseca, Stephanie
Hernández Murillo, Camila
Montero Zeledón, Ernesto
Gutiérrez Fallas, Dionisio
Urcuyo Solórzano, Roberto
Puente Urbina, Allen
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ISSN de la revista
Título del volumen
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Resumen
Los alótropos de carbono han ganado interés en las últimas décadas debido a sus propiedades
y a la gran variedad de posibles aplicaciones tecnológicas que han demostrado. Por dichas
razones, la obtención de estos alótropos con diferentes propiedades y coberturas es
ampliamente investigado. La Deposición Química en Fase de Vapor (CVD, por sus siglas en
inglés) es una de las técnicas más utilizadas para obtener este tipo de materiales con una alta
calidad y cobertura en una forma controlada. En CVD, se utilizan metales de transición como
catalizadores, fuentes de carbono gaseosas y altas temperaturas. En este reporte, se presentan
estructuras de carbono sintetizadas sobre sustratos de cobre utilizando Deposición Química
en Fase de Vapor a Baja Presión (LPCVD, por sus siglas en inglés) con acetileno como fuente
de carbono. Los sustratos de cobre se trataron térmicamente bajo una atmósfera reductora de
hidrógeno-argón y luego se expusieron a acetileno, variando el flujo de acetileno y el tiempo
de deposición. Los materiales resultantes se caracterizaron mediante microscopía óptica y
espectroscopía Raman. El enfoque seguido permitió determinar las mejores condiciones de
síntesis de grafeno monocapa, de crecimiento irregular.
Carbon allotropes have gained interest in recent decades due to their properties and the wide variety of possible technological applications they have demonstrated. For such reasons, obtaining these allotropes with different properties and coverage is extensively investigated. Chemical Vapor Deposition (CVD) is one of the most widely used techniques to obtain this type of materials with high quality and coverage in a controlled manner. In CVD, there are used transition metals as catalysts, gaseous carbon sources, and high temperatures. In this report, carbon-on-copper structures were synthesized using Low Pressure Chemical Vapor Deposition (LPCVD) with acetylene as a carbon source. The copper substrates were heat-treated under a reducing hydrogen-argon atmosphere and then exposed to acetylene, varying the acetylene flow and the deposition time. The resulting materials were characterized by optical microscopy and Raman spectroscopy. The approach followed allowed to determine the best conditions for the synthesis of monolayer graphene with irregular growth.
Carbon allotropes have gained interest in recent decades due to their properties and the wide variety of possible technological applications they have demonstrated. For such reasons, obtaining these allotropes with different properties and coverage is extensively investigated. Chemical Vapor Deposition (CVD) is one of the most widely used techniques to obtain this type of materials with high quality and coverage in a controlled manner. In CVD, there are used transition metals as catalysts, gaseous carbon sources, and high temperatures. In this report, carbon-on-copper structures were synthesized using Low Pressure Chemical Vapor Deposition (LPCVD) with acetylene as a carbon source. The copper substrates were heat-treated under a reducing hydrogen-argon atmosphere and then exposed to acetylene, varying the acetylene flow and the deposition time. The resulting materials were characterized by optical microscopy and Raman spectroscopy. The approach followed allowed to determine the best conditions for the synthesis of monolayer graphene with irregular growth.
Descripción
Palabras clave
CARBONO, QUÍMICA, ESTRUCTURAS, GRAFENO